Applications
■Rapid Thermal Process (RTP) like Lamp annealing
When temperature rises rapidly, a controller with fast sampling and an output device with fast response need to be used.
＞＞Merits of introducing this system
- During the temperature control of rapid temperature rise, overshoot can be suppressed and throughput can be improved.
Typical models
Digital Controllers (Process and Temperature Controllers)
FZ110 / FZ400 / FZ900
- Measurement accuracy: ±0.1% of displayed value
- Sampling time: 0.05 sec.
- 11-segment 5 digit LCD display
- Front loader communication port
- Dual input function (FZ400 / FZ900)
- Plug-in construction (FZ400 / FZ900)
Single Phase Power Controller
THV
This type of product receives analog signal such as 4-20mA from an external controller and regulate power to the heater continuously and sensitively. Single phase and three phase types are available.